Valve Manifold Boxes

Valve Manifold Boxes
The Exentec Valve Manifold Box (VMB) provides safe and reliable distribution points for a gas system. The VMB can include up to eight individual sticks distributing gas from a single supply line. An optional integrated vacuum generator and N2 purge provide a safe and effective means of purging the lines for service. The VMB system can be configured for a fully automatic system, a semi-automatic system or a fully manual system with ESO capability.
The Valve Manifold Box system is configured in either a panel VMP (for inert gases), or a cabinet (for systems that require exhaust capabilities). The system controller varies depending on the need for automation and factory communications.
The family of controllers includes manual push-button operations as an economic option for simpler systems, a semi-automatic operation that maintains the safety functions of the automatic with minimal shutdown capabilities and fully automatic distribution venting and purge functions. The automatic systems can be selected as up to 4- or 8-stick standard configurations. All VMBs are available with a double-isolation configuration for all of the process valves.
Contact Exentec for assistance in developing a system to meet your process needs.
Features & Benefits
- Inert, toxic and hazardous gases; manual, semi-auto and fully automatic with a touch-screen interface
- Cabinet or panel mount
- Up to 8 individual UHP gas sticks in a compact enclosure
- Variable stick configurations provide versatility
- Straight-through valve design improves gas flow and reduces internal volume
- Life safety relay logic to override PLC for fi re, leak, toxic and facility shutdowns with relay feedback
- Optional vent with vacuum generator; N2 purge for efficient and safe purging of hazardous gases
- ESO or stick shutdown capability for individual tool control
- SEMI-S2 compliant
Controller Options
- Manual push-button
- Up to 8-stick semi-auto
- Up to 4-stick auto
- Up to 8-stick auto
VMB Features
- UV/IR sensor
- Temperature switch
- Door interlocks
- Remote shutdown relays
- EMO
- Sprinklers
- Toxic monitors
VMB Enclosure
- 27” W x 19.23” D x 28” H with 3” exhaust
Optional VMB Accessories
- Door/Window Sensors: Provide programmable alarm if door or window is opened
- Toxic Monitor: Monitors enclosure continuously for any sign of toxic leak
- Fire Sensors: Standard temperature switch or optional UV/IR or dual IR sensors
- Panel Heater for LVP gases
High Purity Bulk Gas Systems
We offer our customers a reliable source of high-quality gas system equipment, and a broad range of products and services
High Purity Spec Gas Systems
We utilize our build capacity and programming expertise to develop game-changing spec gas delivery systems
Gas Cabinets
A wide range of cabinets, controllers and panels can be configured into a system engineered to match your needs
Gas Blender Systems
The Exentec Gas Blender is a closed-loop, control-based gas blending system combined with a built-in analyzer
Valve Manifold Boxes
The Exentec Valve Manifold Box (VMB) provides safe and reliable distribution points for a gas system
Valve Manifold Panels
Exentec’s high-purity media supply Team has extensive experience manufacturing and installing high-purity gas panels and equipment.
Bulk Specialty Gas Systems
The Bulk Specialty Gas System (BSGS) is a state-of-the-art distribution system designed for safe, automatic delivery of bulk specialty gases
Liquide Precursor Delivery Systems
Exentec’s Liquide (precursor) Delivery System is a chemical distribution system designed to maximize efficiency and performance
Gas Delivery System Controllers
The available options for our family of controllers increase in specificity as the needs and demands change with the end user
Vapor Delivery System
Exentec’s Vapor Delivery System is a chemical vapor distribution system designed to maximize efficiency and performance
Customized Gas Supply Container
Exentec’s complete solutions in the technical/safety container are ideal for a variable and flexible gas supply.