Gas Cabinets
Gas Cabinets
A wide range of cabinets, controllers and panels can be configured into a system engineered to match your needs. In addition, extensive options are available to meet the industry standards in nearly every gas system. Gas Distribution Systems have a proven record for semiconductor applications with 99.999% uptime. Exentec also provides custom systems and solutions in circumstances where standard configurations are not sufficient. The family of controllers includes a manual switch for cylinder changeover, a semi-automatic changeover that monitors pressure or cylinder weight and fully automated changeover, complete with user-configurable alarms and operating parameters, such as timers and set points.
Contact us for assistance in developing a system that meets your needs.
- High Pressure
- Low Pressure
- High Flow
- Liquified Gases
Features & Benefits
- Inert, toxic hazardous gases; semi-auto or fully automatic with a touchscreen interface
- Cabinet or rack-mounted
- Single-, dual- and multiple-process panel configurations
- Optional purge panel with purge procedure proven in corrosive applications, such as F2, HF, HCl, and WF6
- Engineered to process requirements
- Life safety relay logic to override PLC for fire, leak, toxic and facility shutdowns with relay feedback
- Modular construction improves service and maintenance
- SEMI-S2 compliant
Controller Options
- Manual switch for automatic cylinder changeovers
- Semi-auto systems with automatic switchover
- Fully automated systems with purge routines
Cabinet Options
- 1-,2-, and 3-cylinder gas rack
- 1-,2-, and 3-cylinder gas cabinet
Panel Options
- Purge panel
- Regulator
- Purifiers
- Pressure switch
- Transmitter
- Process panel
- Manual panels, 3–8 valves
- Automatic panels, 5–8 valves
- Purifiers & filters
- Pressure switches
- Transmitters
- Flow switches
- Test valves
- Manual isolation valves
- Emergency shutoff valves
Gas Cabinet Enclosure
- M1 & 2 cylinder: 26’’ W x 28” D x 90” H with 6” exhaust
- 3 cylinder: 42” W x 28” D x 90” H with 6” exhaust
Safety Options
- UV/IR sensor
- Temperature switch
- Leak sensor
- Door interlocks
- Remote shutdown relays
- EMO
- Sprinklers
- Heat
- Cool (Chiller)
High Purity Bulk Gas Systems
We offer our customers a reliable source of high-quality gas system equipment, and a broad range of products and services
High Purity Spec Gas Systems
We utilize our build capacity and programming expertise to develop game-changing spec gas delivery systems
Gas Cabinets
A wide range of cabinets, controllers and panels can be configured into a system engineered to match your needs
Gas Blender Systems
The Exentec Gas Blender is a closed-loop, control-based gas blending system combined with a built-in analyzer
Valve Manifold Boxes
The Exentec Valve Manifold Box (VMB) provides safe and reliable distribution points for a gas system
Valve Manifold Panels
Exentec’s high-purity media supply Team has extensive experience manufacturing and installing high-purity gas panels and equipment.
Bulk Specialty Gas Systems
The Bulk Specialty Gas System (BSGS) is a state-of-the-art distribution system designed for safe, automatic delivery of bulk specialty gases
Liquide Precursor Delivery Systems
Exentec’s Liquide (precursor) Delivery System is a chemical distribution system designed to maximize efficiency and performance
Gas Delivery System Controllers
The available options for our family of controllers increase in specificity as the needs and demands change with the end user
Vapor Delivery System
Exentec’s Vapor Delivery System is a chemical vapor distribution system designed to maximize efficiency and performance
Customized Gas Supply Container
Exentec’s complete solutions in the technical/safety container are ideal for a variable and flexible gas supply.