Gas Delivery System Controllers
Gas Delivery System Controllers
Exentec’s Liquide (precursor) Delivery System is a chemical distribution system designed to maximize efficiency and performance. The stand-alone system includes redundant panels with auto-crossover capability for increased uptime > 99.9%. The small footprint with large process capacity is designed to distribute liquid chemical via a push gas. On day-tank-type systems, the liquid level has a linear indication for consistent level monitoring. High-precision scale options offer grams per run for tight process control. PLC components are consistent with our line of gas cabinets and VMB controllers to minimize spares inventory. The LDS is a fully automatic system for maximum safe operation and performance.
Features & Benefits
- PLC-based control with touch-screen interface for reliable operation
- Complete startup, canister and line purge routines with proven safe performance
- Adjustable shelf for different canister options up to 20 liter
- Semi-compliant system and controller
- Tool interface for System OK, Request Chem and/or Purge
- Typical systems process applications, including life safety alarm monitoring
- BPSG: TEOS, TEB, TEPO
- High-k dielectrics: 4MS, DMPS, DMDMOS, TMCTS
- Low-k dielectrics: TDMAS, TMA
Product Options
- Push-gas regulation for consistent delivery pressure
- Multiple outlet configurations with tool interface
- Vacuum pump
- De-gas units
- High-flow systems
- Day tank for continued process during canister change
- Linear-level sensor in day tank for real-time level indication
- Auto-crossover systems for system redundancy and increased uptime
- High-precision scales for grams-per-run information
- Automatic canister refill from bulk supply canisters
- Controller-redundant power supplies, solenoid valves or PLC
- PLC hold last state Touch-Screen Display
- 10.4” full-color display for high visibility
- Provides a graphical display of the entire panel
- Shows valve status during normal operation, purging and manual modes
Cabinet Construction
- Superior construction using 11-gauge cold rolled steel, a polyester powder coating for superior corrosion resistance and an all-welded inner enclosure for canister containment
- Cabinet louvers eliminate dead or trapped vapor areas
- Doors – Enclosure gasket and reliable hinges for years of trouble-free service
- Exhaust sensor – Alarm can initiate chemical shutdown or offer warning with non-shutdown audible alarm or remote alarm as needed
- Life safety relay logic to override PLC for fire, leak, toxic and facility shutdowns with relay feedback
- Fire sensor, ROR or UV/IR, sprinkler heads
- 110% canister leak containment
Touch-Screen Display
- 10.4” full-color display for high visibility
- Provides a graphical display of the entire panel
- Shows valve status during normal operation, purging and manual modes
High Purity Bulk Gas Systems
We offer our customers a reliable source of high-quality gas system equipment, and a broad range of products and services
High Purity Spec Gas Systems
We utilize our build capacity and programming expertise to develop game-changing spec gas delivery systems
Gas Cabinets
A wide range of cabinets, controllers and panels can be configured into a system engineered to match your needs
Gas Blender Systems
The Exentec Gas Blender is a closed-loop, control-based gas blending system combined with a built-in analyzer
Valve Manifold Boxes
The Exentec Valve Manifold Box (VMB) provides safe and reliable distribution points for a gas system
Valve Manifold Panels
Exentec’s high-purity media supply Team has extensive experience manufacturing and installing high-purity gas panels and equipment.
Bulk Specialty Gas Systems
The Bulk Specialty Gas System (BSGS) is a state-of-the-art distribution system designed for safe, automatic delivery of bulk specialty gases
Liquide Precursor Delivery Systems
Exentec’s Liquide (precursor) Delivery System is a chemical distribution system designed to maximize efficiency and performance
Gas Delivery System Controllers
The available options for our family of controllers increase in specificity as the needs and demands change with the end user
Vapor Delivery System
Exentec’s Vapor Delivery System is a chemical vapor distribution system designed to maximize efficiency and performance
Customized Gas Supply Container
Exentec’s complete solutions in the technical/safety container are ideal for a variable and flexible gas supply.