High Purity Spec Gas Systems
High Purity Spec Gas Systems
To serve today’s semiconductor gas market, we utilize our build capacity and programming expertise to develop game-changing spec gas delivery systems. Our high purity spec gas systems come equipped with advanced functionality and capabilities including an open, fully integrated PLC and HMI panel, with connectivity and networkability, operational sequences, and automated pressure control.
Our systems are designed to be easily retrofitted into existing, compact gas cabinets and to give users 100 percent visibility of all operational parameters. This allows users to control, interface with and monitor all aspects of cabinet operation from a variety of third-party software platforms.
System Benefits
- Compact I/O and processor to fit into small cabinet
- Provides remote access to all parameters within the gas delivery control system
- Provides continuous gas flow to tools with minimal technician intervention
- Automatically controls supply point pressure without the use of manual regulators
- Automated gas delivery pressure control minimizes pressure fluctuations
- Automated pressure control technology reduces Technician interface by 30%
- Automated pressure control eliminates need to open cabinet for manual adjustments, improving safety
- Precise automated controls provide consistent flow, improving process control
High Purity Bulk Gas Systems
We offer our customers a reliable source of high-quality gas system equipment, and a broad range of products and services
High Purity Spec Gas Systems
We utilize our build capacity and programming expertise to develop game-changing spec gas delivery systems
Gas Cabinets
A wide range of cabinets, controllers and panels can be configured into a system engineered to match your needs
Gas Blender Systems
The Exentec Gas Blender is a closed-loop, control-based gas blending system combined with a built-in analyzer
Valve Manifold Boxes
The Exentec Valve Manifold Box (VMB) provides safe and reliable distribution points for a gas system
Valve Manifold Panels
Exentec’s high-purity media supply Team has extensive experience manufacturing and installing high-purity gas panels and equipment.
Bulk Specialty Gas Systems
The Bulk Specialty Gas System (BSGS) is a state-of-the-art distribution system designed for safe, automatic delivery of bulk specialty gases
Liquide Precursor Delivery Systems
Exentec’s Liquide (precursor) Delivery System is a chemical distribution system designed to maximize efficiency and performance
Gas Delivery System Controllers
The available options for our family of controllers increase in specificity as the needs and demands change with the end user
Vapor Delivery System
Exentec’s Vapor Delivery System is a chemical vapor distribution system designed to maximize efficiency and performance
Customized Gas Supply Container
Exentec’s complete solutions in the technical/safety container are ideal for a variable and flexible gas supply.