Exentec is the supplier of choice for major semiconductor companies around the world, providing Point-of-Use (POU) abatement (gas scrubber) solutions for deposition, etch and diffusion process tools.
Our systems are some of the most efficient and reliable Epi scrubbers available. We combine inlet device technology with a PLC-based control box and automated gas inlet plunger to produce a low-maintenance Epi scrubber. This performance results in higher uptime, greater process stability and increased safety. Our scrubbers combine 2 spray chambers and a packed column to produce some of the highest efficiencies in the industry.
Markets:
- Advanced Technology Facilities
Superior Technology
Gas inlet clogging in Epi scrubbers has been a major problem for decades. Years of experience in Epi reactor operation, design and maintenance led Exentec engineers to develop Point Of Use gas abatement technology that's unrivaled in the industry. The Exentec scrubber removes >99.99% of water-soluble gasses by using a special combination of patented non-clogging gas inlet device, high-flow spray chambers and a unique packed column design. Typical output emissions of HCI under the harshest Epi process conditions are well under 1 ppm. For Poly Etch and other CVD processes, one scrubber can handle up to four chambers.
Inlet Devices
Our scrubbers and inlet devices are world renowned with more than 1000 units in the field servicing Epitaxial, Metal Etch, Poly Etch and CVD process abatement applications.
Cyclone
Our deluxe scrubber, complete with all "zero-scrubber-related process tool downtime" features.
Encompass
Custom Products
Cleanroom
Use superior solutions and comprehensive services
Use superior solutions and comprehensive services
Air Handling Units
Air Handling Units from Exentec are distinguished by energy-efficient design. Our research and development team works with state-of-the art equipment and always contributes the latest knowledge.
Critical Subsystems and Controlled Environments
Pure media supply systems for sensitive products
Sensors and Ampoules
State-of-the-art ampoules, pyrophoric chemical handling and liquid level sensors.
We manufacture liquid level sensors, pyrophoric chemical handling and DOT 4B ampoules, cylinders and canisters widely used in the semiconductor, photovoltaic and battery industries.
