Gas Inlet Configurations

Heated/CVD: Combining an internally heated, teflon lined and insulated inlet design with our automated plunger, this scrubber can reduce your scrubber related downtown to zero.

Poly Etch CVD Inlet: Highly efficient gas scrubbing with patented gas inlet devices that minimize restrictions.

High-Temperature Inlet: For high temperature gas stream up to 220ºC.

Epitaxial Inlet: Exentec-specialized gas entry device that minimizes inlet restrictions and an automated gas inlet plunger that extends the hands-on maintenance interval to every 6 months.

Standard EPI. Only 1 port for EPI, vortex and Cyclone, 2 inch PVC slip fit.
Standard 1-to-4 port non-heated Vortex and Cyclone. Poly 1.5 inch slip-fit PVC inlets are standard but can be modified to incorporate SS reinforced KF 40 flange adapters.
Standard XL 2 ports only, unheated only, KF 80, SS.
Standard 1 to 4 port heated, Cyclone 1.5 inch SS KF 40 flange.

Encompass

Leveraging our unique value proposition in wet scrubbing, Exentec has introduced Encompass, our first thermal product line

Cyclone

The Cyclone is Exentec's deluxe scrubber model

Cyclone XL

The Cyclone XL features a coarse-spray, high-flow nozzle that coats the first scrubbing chamber and removes bulk impurities.

Vortex

The Vortex is Exentec's original scrubber model and includes our specialized gas entry device

Gas Inlet Configurations

Exentec provides heated, poly etch CVD, high temperature and epitaxial inlets