Cyclone
Cyclone
The Cyclone is Exentec's deluxe scrubber model and includes all the advanced features that allow Exentec to claim zero scrubber related process tool downtime.
- Eductor Cone: Keeps exhaust line at slightly negative pressure (a nominal draw of 1-2 inches of water.)
- Gas Inlet Devices: Specialized gas inlet devices minimize rate of restriction and automatic gas inlet plunger removes restrictions without process interruptions.
- Packed Column: The final polish. Packing requires no maintenance or replacement.
- Second Scrubbing Chamber: Five fine sprays and high velocity nozzles ensure effective removal of impurities.
- First Scrubbing Chamber: Coarse spray, high-flow nozzle coats chamber and removes bulk impurities.
- Fresh Water Input: Strategic position increases efficiency, minimizes water use and eliminates foam.
- Pump: Corrosion resistant, high output and long life. Recirculates 25GPM.
- Sump Geometry: Unique pump input, drain, and fresh water input locations prevent foaming, sediment, and minimize water use.
- Small Footprint: 24.5 inches by 32.5 inches
Encompass
Leveraging our unique value proposition in wet scrubbing, Exentec has introduced Encompass, our first thermal product line
Cyclone XL
The Cyclone XL features a coarse-spray, high-flow nozzle that coats the first scrubbing chamber and removes bulk impurities.
Vortex
The Vortex is Exentec's original scrubber model and includes our specialized gas entry device
Gas Inlet Configurations
Exentec provides heated, poly etch CVD, high temperature and epitaxial inlets