Precise Environmental Control Chamber
Precise Environmental Control Chamber
Exentec Precise Environmental Chambers provide very low temperature and humidity tolerances, absolute cleanliness in regards to gaseous and particulate contamination and shielding of acoustic, vibrational and electromagnetic influences.
Cooling Water Cabinets
Exentec's solution is to separate the cooling circuits of fab and tool, and usage of Ultra-Pure-Water (UPW) in the tool circuit.
Precise Environmental Control Chamber
Exentec Precise Environmental Chambers provide very low temperature and humidity tolerances, absolute cleanliness in regards to gaseous and particulate contamination and shielding of acoustic, vibrational and electromagnetic influences.
Precision Climate Control Systems
Exentec provides Precision Climate Control System for the semiconductor industry and nanotechnology and the production of optical storage media requiring a consistently stable process and measurement environments.
Dew Point Control Solution
Exentec offers systems and solutions with displacement gases for the highest requirements regarding cleanliness, temperature stability and dryness.
Ultrapure Water Conditioning
Precise conditioning of fluid media at innovative production environments.
Advanced Technology Facilities
Innovative, very sensitive production processes, increasing quality standards and the fast progress in research and development present steady growing challenges to production and development environments in the semiconductor and optical industries as well as for nanotechnology and micromechanics.
Very low temperature and humidity tolerances, absolute cleanliness in regards to gaseous and particulate contamination as well as the shielding of acoustic, vibrational and electromagnetical influences to the customer's processes are the key factors for optimum production processes. Our solution: the MEC System (Modular Environmental Chamber)
- Stable and reproducable process environments
- Deposition of particulate and chemical contaminants
- Precise temperature control
- Acoustic shielding
Technical Data
Performance Parameters
Below information should be presented in a two-column chart. See content source document Precise Environmental ControL Chamber.docx
Typ
Value
Air volume flow
2.95 m³/h
Air temperature
22 °C
Temperature stability
± 5 mK down to ± 1 mK
Humidity
33 % r.H.
Humidity stability
± 0.3 % r.H.
Acoustic shielding
for 100 < f < 5000 Hz: -15 dB
Magnetic shielding
for 10 < f < 200 Hz: -30 dB